Compound Semiconductor

At D&X, with a focus on Silicon Carbide wafers, goes beyond supplying compound materials. We boast several production lines dedicated to Silicon Carbide wafers, leveraging our established expertise to meet your specific requirements.

Our confidence in satisfying your needs stems from our long-standing commitment to excellence. With a proven track record and in-depth knowledge of these advanced materials' applications, D&X stands as a reliable partner in the semiconductor industry. The combination of our established production lines and specialized expertise positions us at the forefront of delivering cutting-edge semiconductor solutions.

Refer to our Stock List for currently available specifications.

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01. COMPOUND SEMICONDUCTOR

Our confidence in satisfying your needs stems from our long-standing commitment to excellence. With a proven track record and in-depth knowledge of these advanced materials' applications, D&X stands as a reliable partner in the semiconductor industry. The combination of our established production lines and specialized expertise positions us at the forefront of delivering cutting-edge semiconductor solutions.

Silicon Carbide (SiC) Wafer Specifications

GradeZero MPDProductionResearch GradeDummy Grade
Diameter50.8 ±0.38 mm // 76.2 ±0.38 mm // 100+0.5 mm // 150±0.25mm
Thickness
4H-N350μm ± 25μm
Thickness
4H-SI500μm ± 25μm
Wafer Crystal OrientationOff axis:4.0° toward 1120! ± 0.5° for 4H-N On axis: <0001> ± 0. 5° for 4H-SI
Micropipe Density<1cm-2<5cm-2<15cm-2<50cm-2
Resistivity
4H-N0.015 ~ 0.028ohm-cm
Resistivity
6H-N0.02 ~ 0.1ohm-cm
Resistivity
4/6H-SI>1E5Q-cm (90%)>1E5Q-cm
Primary Flat{10-10} ± 5.0°
Primary Flat Length15.9 mm ± 1.7 mm // 22.2 mm ± 3.2 mm // 32.5 mm ± 2.0 mm // 47.5 mm ± 2.5mm
Secondary Flat Length8.0 mm ± 1.7 mm // 11.2 mm ± 1.5 mm, 18.0mm ± 2.0 mm // —–
Secondary Flat OrientationSilicon face up: 90° CW from Prime flat ± 5.0°

Indium Phosphide (InP) Specifications

Growth MethodVGF
Type/DopantUndoped // N/S/Sn // P/Zn
Size2inch3inch4inch
Diameter (mm)50.8±0.376.2±0.3100±0.3
Thickness (um)350±25625±25625±25
OF(mm)16±222±232.5±2
IF(mm)8±212±218±2
Orientation(100)±0.5
TTV(um)≦10≦15≦15
Bow(um)≦15≦15≦15
Wrap(um)≦15≦15≦15
SurfacePolished/Etched
Epi-readyYes

Gallium Arsenide (GaAs) Wafer Specification

Diamter50 ~ 150mm ± 0.25mm(2″ // 3″ // 4″ // 6″)
MaterialSingle Crystal Gallium Arsenide
Growth MethodVGF // LEC Grown
Crystal Orientation<100> // <111>
Crystal Orientationα 0 ± β 0, off angle α and accuracy β upon request
DopantUndoped // Zn // Si // Te
Thickness350 ± 25um // 550 ± 25um // 625 ± 25um
Mobility1500 ~ 3000 // 3000 ~ 5000 cm2 / V·sec
Primary Flat<0-1-1> ± 0.5deg, 16 ±1.0mm // 22±1.0mm // 32.5±1.0mm
Secondary Flat<0-1-1> ± 5.0 deg, 8 ±1.0mm // 11±1.0mm // 18±1.0mm
Front-sidePolished in Epi-ready Prime grade
Back-sidePolished / Lapping or Etched
Epi-readyYes

Germanium (Ge) Wafer Specifications

Diameter2 inch ~ 6 inch
Thickness175um // 200um / 400um // 500um // 625um
Type/DopantUndopedN/SbP/Ga
Resistivity (Ω・cm)>30>0.005>0.005-0.04
EP(/cm2)<3000<30000
Orientation<100> // <111>
TTV≤25μm
Bow≤25μm
Wrap≤25μm
SurfaceE/E // P/E // P/D
Epi-readyYes

Indium Antimonide (InSb) Wafer Specifications

Growth MethodVGF
Type/DopantUndoped // N/S/Sn // P/Zn
Diameter(mm)50.8 ± 0.376.2 ± 0.3
Thickness(um)500 ± 25650 ± 25
OF(mm)16 ± 222 ± 2
IF(mm)8 ± 212 ± 2
Orientation<100>
TTV(um)≤10≤15
Bow(um)≤15≤15
Wrap(um)≤15≤15
SurfacePolished/Etched
Epi-readyYes

Indium Arsenide (InAs) Wafer Specifications

Growth MethodVGF
Type/DopantUndoped // N/S/Sn // P/Zn
Diameter(mm)50.8 ± 0.376.2 ± 0.3100 ± 0.3
Thickness(um)500 ± 25600 ± 25800 ± 25
OF(mm)16 ± 222 ± 232.5 ± 2
IF(mm)8 ± 212 ± 218 ± 2
Orientation<100> // <111>
TTV(um)≤10≤10≤15
Bow(um)≤10≤10≤15
Wrap(um)≤15≤15≤15
SurfacePolished/Etched
Epi-readyYes

Gallium Nitride (GaN) Wafer Specifications

Growth MethodHVPE
Conduct TypeSemi-InsulatingNN
Type/DopantFeGeUndoped
Size10×10.5mm // 100.5 ± mm
OF location/length<1-100> ± 0.5° // 32.0 ± 1.0mm
IF location/length<11-20> ± 3° // 18.0 ± 1.0mm
OrientationC-plane<0001> off angle toward M-Axis 0.35° ± 0.15mm
Resistivity(300k)≧1E6 ohm-cm <0.05ohm.cm <0.5ohm.cm
EPD(1 ~ 9)E5/cm2 5E5 ~ 3E6/cm2 (1 ~ 3)E6/cm2
Ra(nm)Frount surface Ra ≤0.2nm
TTV(um)≤ 15
Bow(um)≤ 20
Wrap(um)≤ 20
Epi-readyYes