Compound Semiconductor

At D&X, with a focus on Silicon Carbide wafers, goes beyond supplying compound materials. We boast several production lines dedicated to Silicon Carbide wafers, leveraging our established expertise to meet your specific requirements.

Our confidence in satisfying your needs stems from our long-standing commitment to excellence. With a proven track record and in-depth knowledge of these advanced materials' applications, D&X stands as a reliable partner in the semiconductor industry. The combination of our established production lines and specialized expertise positions us at the forefront of delivering cutting-edge semiconductor solutions.

Refer to our Stock List for currently available specifications.

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01. COMPOUND SEMICONDUCTOR

Our confidence in satisfying your needs stems from our long-standing commitment to excellence. With a proven track record and in-depth knowledge of these advanced materials' applications, D&X stands as a reliable partner in the semiconductor industry. The combination of our established production lines and specialized expertise positions us at the forefront of delivering cutting-edge semiconductor solutions.

Silicon Carbide (SiC) Wafer Specifications

Grade Zero MPD Production Research Grade Dummy Grade
Diameter 50.8 ±0.38 mm // 76.2 ±0.38 mm // 100+0.5 mm // 150±0.25mm
Thickness
4H-N 350μm ± 25μm
Thickness
4H-SI 500μm ± 25μm
Wafer Crystal Orientation Off axis:4.0° toward 1120! ± 0.5° for 4H-N On axis: <0001> ± 0. 5° for 4H-SI
Micropipe Density <1cm-2 <5cm-2 <15cm-2 <50cm-2
Resistivity
4H-N 0.015 ~ 0.028ohm-cm
Resistivity
6H-N 0.02 ~ 0.1ohm-cm
Resistivity
4/6H-SI >1E5Q-cm (90%) >1E5Q-cm
Primary Flat {10-10} ± 5.0°
Primary Flat Length 15.9 mm ± 1.7 mm // 22.2 mm ± 3.2 mm // 32.5 mm ± 2.0 mm // 47.5 mm ± 2.5mm
Secondary Flat Length 8.0 mm ± 1.7 mm // 11.2 mm ± 1.5 mm, 18.0mm ± 2.0 mm // —–
Secondary Flat Orientation Silicon face up: 90° CW from Prime flat ± 5.0°

Indium Phosphide (InP) Specifications

Growth Method VGF
Type/Dopant Undoped // N/S/Sn // P/Zn
Size 2inch 3inch 4inch
Diameter (mm) 50.8±0.3 76.2±0.3 100±0.3
Thickness (um) 350±25 625±25 625±25
OF(mm) 16±2 22±2 32.5±2
IF(mm) 8±2 12±2 18±2
Orientation (100)±0.5
TTV(um) ≦10 ≦15 ≦15
Bow(um) ≦15 ≦15 ≦15
Wrap(um) ≦15 ≦15 ≦15
Surface Polished/Etched
Epi-ready Yes

Gallium Arsenide (GaAs) Wafer Specification

Diamter 50 ~ 150mm ± 0.25mm(2″ // 3″ // 4″ // 6″)
Material Single Crystal Gallium Arsenide
Growth Method VGF // LEC Grown
Crystal Orientation <100> // <111>
Crystal Orientation α 0 ± β 0, off angle α and accuracy β upon request
Dopant Undoped // Zn // Si // Te
Thickness 350 ± 25um // 550 ± 25um // 625 ± 25um
Mobility 1500 ~ 3000 // 3000 ~ 5000 cm2 / V·sec
Primary Flat <0-1-1> ± 0.5deg, 16 ±1.0mm // 22±1.0mm // 32.5±1.0mm
Secondary Flat <0-1-1> ± 5.0 deg, 8 ±1.0mm // 11±1.0mm // 18±1.0mm
Front-side Polished in Epi-ready Prime grade
Back-side Polished / Lapping or Etched
Epi-ready Yes

Germanium (Ge) Wafer Specifications

Diameter 2 inch ~ 6 inch
Thickness 175um // 200um / 400um // 500um // 625um
Type/Dopant Undoped N/Sb P/Ga
Resistivity (Ω・cm) >30 >0.005 >0.005-0.04
EP(/cm2) <3000 <3000 0
Orientation <100> // <111>
TTV ≤25μm
Bow ≤25μm
Wrap ≤25μm
Surface E/E // P/E // P/D
Epi-ready Yes

Indium Antimonide (InSb) Wafer Specifications

Growth Method VGF
Type/Dopant Undoped // N/S/Sn // P/Zn
Diameter(mm) 50.8 ± 0.3 76.2 ± 0.3
Thickness(um) 500 ± 25 650 ± 25
OF(mm) 16 ± 2 22 ± 2
IF(mm) 8 ± 2 12 ± 2
Orientation <100>
TTV(um) ≤10 ≤15
Bow(um) ≤15 ≤15
Wrap(um) ≤15 ≤15
Surface Polished/Etched
Epi-ready Yes

Indium Arsenide (InAs) Wafer Specifications

Growth Method VGF
Type/Dopant Undoped // N/S/Sn // P/Zn
Diameter(mm) 50.8 ± 0.3 76.2 ± 0.3 100 ± 0.3
Thickness(um) 500 ± 25 600 ± 25 800 ± 25
OF(mm) 16 ± 2 22 ± 2 32.5 ± 2
IF(mm) 8 ± 2 12 ± 2 18 ± 2
Orientation <100> // <111>
TTV(um) ≤10 ≤10 ≤15
Bow(um) ≤10 ≤10 ≤15
Wrap(um) ≤15 ≤15 ≤15
Surface Polished/Etched
Epi-ready Yes

Gallium Nitride (GaN) Wafer Specifications

Growth Method HVPE
Conduct Type Semi-Insulating N N
Type/Dopant Fe Ge Undoped
Size 10×10.5mm // 100.5 ± mm
OF location/length <1-100> ± 0.5° // 32.0 ± 1.0mm
IF location/length <11-20> ± 3° // 18.0 ± 1.0mm
Orientation C-plane<0001> off angle toward M-Axis 0.35° ± 0.15mm
Resistivity(300k) ≧1E6 ohm-cm <0.05ohm.cm <0.5ohm.cm
EPD (1 ~ 9)E5/cm2 5E5 ~ 3E6/cm2 (1 ~ 3)E6/cm2
Ra(nm) Frount surface Ra ≤0.2nm
TTV(um) ≤ 15
Bow(um) ≤ 20
Wrap(um) ≤ 20
Epi-ready Yes